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篇目详细内容 |
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【篇名】 |
Study on a vapor sensor based on the optical properties of porous silicon microcavities |
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【刊名】 |
Frontiers of Physics in China |
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【刊名缩写】 |
Front. Phys. China |
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【ISSN】 |
1673-3487 |
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【EISSN】 |
1673-3606 |
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【DOI】 |
10.1007/s11467-007-0035-2 |
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【出版社】 |
Higher Education Press and Springer-Verlag |
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【出版年】 |
2007 |
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【卷期】 |
2
卷2期 |
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【页码】 |
166-170
页,共
5
页 |
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【作者】 |
ZHANG Le-xin;
ZHANG Ran;
LI Zhi-quan;
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【关键词】 |
PSMs; transfer matrix; Bruggeman effective medium approximation; organic vapor; species detecting |
【摘要】 |
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In this paper, we set up a sensing model of PSMs (porous silicon microcavities) by applying the Bruggeman effective medium approximation theory and the transfer matrix method. In addition, we explain in detail the adsorption characteristics of porous silicon. Finally, using an experimental setup to measure the reflectivity spectrum of PSMs when the sensor is exposed to different organic vapors, the experimental results prove that it is a feasible optical sensor for the detection of organic species. Resolution of the PSMs sensor is high, response time and resume time is short and repetition is good. |
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