A two-step method was proposed to synthesize V2O5 films on planar substrates, i.e., depositing a V2O3 thin film at ~160°C (by heating a pure sheet of vanadium in a rough vacuum) and then heat-treating it in air at ~600°C. The films, made up of nano crystal particles, had good photoluminescence (PL) properties, and the peak was in the position of about 700nm. Further, photosensitivity characteristics of these V2O5 thin films were investigated at room temperature. The results show that this film is sensitive to ultraviolet rays, which indicates good potential application for an ultraviolet photo detector (UVPD).