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篇目详细内容 |
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【篇名】 |
Microring resonator for glucose sensing applications |
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【刊名】 |
Frontiers of Optoelectronics in China |
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【刊名缩写】 |
Front. Optoelectron. China |
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【ISSN】 |
1674-4128 |
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【EISSN】 |
1674-4594 |
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【DOI】 |
10.1007/s12200-009-0047-3 |
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【出版社】 |
Higher Education Press and Springer-Verlag |
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【出版年】 |
2009 |
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【卷期】 |
2
卷3期 |
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【页码】 |
304-307
页,共
4
页 |
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【作者】 |
Yao Chen;
Zhengyu Li;
Huaxiang Yi;
Zhiping Zhou;
Jun Yu;
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【关键词】 |
microring resonator; chemical sensor; glucose sensing; refractive index unit (RIU); Q factor |
【摘要】 |
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Silicon nitride microring resonators were demonstrated as chemical sensors. The microring devices, with diameter of 100 μm, were fabricated using complementary metal oxide semiconductor (CMOS)-compatible technology, and a high Q factor of 15000 was realized with free spectrum range (FSR) of 2 nm. The structures were further packaged to perform as chemical sensors, and their functionality was proved using deionized water (DI water) and ethanol as detecting mediums. Lastly, the packaged chips were used to detect glucose solutions with various concentrations, and a detection capability of refractive index change of 10−3 refractive index unit (RIU) was obtained. |
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